Download PDF by Andreas Hierlemann: Integrated Chemical Microsensor Systems in CMOS Technology

By Andreas Hierlemann

This booklet offers a finished remedy of the very interdisciplinary ?eld of CMOS technology-based chemical microsensor structures. it truly is, at the one hand, particular at scientists and engineers drawn to getting rst - attractions within the ?eld of chemical sensing on account that all invaluable basic kno- edgeisincluded.Ontheotherhand, italsoaddressesexpertsinthe?eldsince it presents particular details on all vital concerns concerning knowing chemicalmicrosensorsand, speci?cally, chemicalmicrosensorsinCMOSte- nology. lots of sensor and integrated-sensor-system implemen- tionsillustratethecurrentstateoftheartandhelptoidentifythepossibilities for destiny advancements. due to the fact that microsensors produce "microsignals," sensor miniaturization with out sensor integration is in lots of circumstances susceptible to failure. This e-book can assist to bare the bene?ts of utilizing built-in electronics and CMOS-technology for constructing chemical microsensor platforms and, in p- ticular, the benefits that consequence from figuring out monolithically built-in sensor structures comprising transducers and linked circuitry on a unmarried chip. After a short creation, the basics of chemical sensing are laid out, includingashortexcursionintotherelatedthermodynamicsandkinetics. Fabrication and processing steps which are time-honored in semiconductor are then abstracted. those extra basic sections are through a quick description of microfabrication innovations and the CMOS s- strateandmaterials.Thereafter, acomprehensiveoverviewofsemiconduct- dependent and CMOS-based transducer buildings for chemical sensors is given.

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Integrated Chemical Microsensor Systems in CMOS Technology (Microtechnology and MEMS) by Andreas Hierlemann


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